Atomic layer deposition of YMnO3 thin films

•YMO thin films synthesized by radical-enhanced atomic layer deposition process.•The structural and morphological studies of films were carried out by XRD and TEM.•YMO films (∼6 nm) on YSZ (1 1 1) has both orthorhombic- and hexagonal- phases.•YMO films (∼6 nm) on YSZ (1 1 1) yielded two TN anomalies at ∼48 K and ∼85 K.•The magneto-electric behavior of YMO film on Si (1 1 1) was studied.