Atomistic Study of Transport Characteristics in Sub-1nm Ultra-narrow Molybdenum Disulfide (MoS2 ) Nanoribbon Field Effect Transistors
2019 Silicon Nanoelectronics Workshop (SNW)(2019)
摘要
In this work, nanoribbon field-effect-transistors (FETs) with an ultra-narrow monolayer MoS
2
channel are investigated to understand the transverse scaling limitations of MoS
2
FETs. It is observed that the bandgap of monolayer nanoribbon MoS
2
can be largely affected by the passivation atoms, wherein OH passivation is more effective than H passivation. Then, impacts of passivation atoms on transport characteristics in MoS
2
FETs with ultra-narrow MoS
2
channel are calculated. Though higher I
on
and lower I
off
can be obtained even in narrow MoS
2
FETs with O/H passivation, I
off
is hard to be suppressed due to the contribution of edge states. Our results indicate that edge states engineering could be one key point to integrate MoS
2
devices into CMOS technology.
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关键词
nanoribbon field-effect-transistors,monolayer nanoribbon MoS,passivation atoms,OH passivation,ultra-narrow MoS,ultranarrow molybdenum disulfide,ultra-narrow monolayer MoS channel,MoS2
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