Flexible Single‐Substrate Integrated Active‐Matrix Pyroelectric Sensor

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS(2019)

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摘要
Recently developed flexible active matrix sensors employ organic and large area electronics to enable artificial sensing skin applications. In the proof-of-concept presented here, an active matrix proximity sensor-array is formed by monolithic integration of screen-printed sensors with organic transistors on a single sheet of a polymer film, using only seven industrially scalable patterning steps. A ferroelectric co-polymer of polyvinylidendifluoride (PVDF) serves as the pyro-sensor material, and bottom-gate top-contact organic thin film transistors switch the sensors during operation. An on/off ratio well above 10(3) and a low off-current below 8 x 10(-11) A of the organic transistors result in a dynamic range of 44 dB and allow to detect a human hand approaching to a distance of 20 cm with a signal-to-noise ratio of 28 dB. A basic matrix operation is demonstrated by the correct tracking of a moving human hand.
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关键词
flexible active-matrix,monolithic integration,organic transistors,printed polyvinylidenefluoride-co-trifluoroethylene,pyro-electric proximity sensors
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