MEMS-based non-contact voltage sensor with multi-mode resonance shutter

•A non-contact voltage sensor with multi-mode resonance shutter is proposed and prototyped.•Lateral, vertical and two torsional vibration mode are achieved by four beam supported resonator.•Proper design of shutters and electrodes realizes electric field sensing for all shutter vibration modes.•Numerical simulation reveals a non-linear sensitivity is due to vertical force from an electrostatic field.•Sub-second response time and calibration using multiple resonance mode are demonstrated.