Heterogeneous Integration Of Light-Emitting Transistors On Silicon For Hybrid Electronic-Photonic Logic Circuitry

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）

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摘要

An array of heterogeneously integrated light-emitting transistors is fabricated after an epitaxial transfer process bonds and interconnects active III-V photonic material onto a CMOS-compatible host wafer for the purposes of establishing a photonic logic network. (C) 2019 The Author(s)

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关键词

heterogeneous integration,hybrid electronic-photonic logic circuitry,heterogeneously integrated light-emitting transistors,epitaxial transfer process bonds,interconnects active III-V photonic material,CMOS-compatible host wafer,photonic logic network

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