The properties of planar Na:CBN waveguide with “well” + “barrier” type by multiple energy helium ion implantation

Sodium doped Calcium Barium Niobate (Na:CBN) is of potential use in integrated optical devices with high-power laser operation because of its unique nonlinear optical properties and the high Curie temperature. In our work, we research the fabrication and properties of planar Na:CBN waveguide by multiple energy He ion implantation. The sample is implanted with (450 + 500 + 550) keV He ions at room temperature with fluence of (3 + 3 + 3) × 1016 ions/cm2. Prism-coupling and end-face coupling measurements are used to investigate the optical properties of ion-implanted Na:CBN crystal. SRIM and FD-BPM simulations have been used to study the damage formation and light propagation process on the Na:CBN waveguide. Micro-Raman imaging is a powerful nondestructive approach to examine lattice modification and local micro-structural change. We perform confocal micro-Raman measurement, which is used to provide the information about the crystal structure of Na:CBN crystal after multiple energy He ion implantation. This work could provide useful information for integrated optical device based on Na:CBN crystal.