Characterization and Modification of Adhesion in Dry and Wet Environments in Thin-Film Parylene Systems

Journal of Microelectromechanical Systems(2018)

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摘要
Parylene C is a thin-film polymer used as a biocompatible barrier layer in biomedical implants and implantable MEMS; free-film Parylene C may serve as both the substrate and insulation in polymer-based microdevices, a growing branch of biomedical technology. The adhesion of vapor deposited Parylene C, particularly when exposed to wet, in vivo environments, is a critical determinant of device lifet...
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关键词
Adhesives,Polymers,Annealing,Chemicals,Implants,In vivo,Metals
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