A Fast Approaching Control Method For Nano-Positioning Systems With Switched Pid Controller

Nano-positioning systems as the key technology have been applied in many fields such as microelectronic engineering, biomedical engineering, optics and precision engineering, etc., where it is required to possess high positioning accuracy, reliability and speed. In this paper, a switched PM controller based fast approaching control method was proposed for the nano-positioning systems. In order to improve the approaching speed of the nano-positioning system without a large overshoot, a switched controller consisting of a fast and a slow PM controller was formulated. The overshoot constraint of the resulting switched closed-loop system is investigated within a set of bilinear matrix inequalities, based on which the search of the controller parameters can be further processed. The proposed control method was evaluated in a nano-positioning experimental system driven by a PZT actuator and the experimental results demonstrated the effectiveness of the switched PM controller for the fast approaching operation.