Millimeter Long Grating Coupler With Uniform Spatial Output

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)(2017)

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摘要
We demonstrate a millimeter long grating coupler with uniform spatial output based on a platform formed by both silicon and Si3N4 and engineered grating duty cycle to match a desired profile of the output beam.
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关键词
engineered grating duty cycle,silicon nitride,silicon,millimeter long grating coupler,output beam,uniform spatial output,Si3N4,SI
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