Surface Acoustic Wave Devices Based on High Quality Temperature-Compensated Substrates

Xiang-Guang Tian,Lu-Qi Tao,Bo Liu,Changjian Zhou,Yi Yang,Tian-Ling Ren

IEEE Electron Device Letters（2016）

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摘要

We report surface acoustic wave (SAW) devices based on two kinds of novel and optimized high quality piezoelectric substrates. SAW devices with excellent temperature stability and electromechanical coupling coefficient using the layered structures LiTaO3 (LT)/Si and LiNbO3 (LN)/SiO2/Si as the substrates are fabricated. These structures exhibit superior temperature performance than the conventional...

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关键词

Surface acoustic wave devices,Substrates,Resonant frequency,Temperature measurement,Temperature distribution,Performance evaluation,Surface acoustic waves

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