Thermal nanometrology using piezoresistive SThM probes with metallic tips.

•Novel type of piezoresistive SThM cantilevers that allow for quantitative spatial and thermal observations.•Integrated thermal probe (due to compact size) ideal for application in small AFM heads without optical beam deflection measurement.•LoFM scanning mode for thermal observation of the nanosize structures.•Characterization of the mechanical probe parameters and piezoresistive deflection sensor combined with calibration of the thermal tip response allowed for quantitative measurements of the thermal behavior of silicon nanoresistors. The technology described in this article made it possible to map temperature distribution on 200 nm wide nanowire biased with current 500 µA.