An Operation-Group Based Soft Scheduling Approach for Uncertain Semiconductor Wafer Fabrication System.

This paper tackles a large-scale and uncertain scheduling problem of semiconductor wafer fabrication system. Two kinds of uncertainties are considered here, including the machine breakdowns and the fluctuations of processing times. Instead of using the traditional rigid schedule, we propose a novel concept of operation-group-based soft schedule which is used as the new decision variable of the stu...