Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques(2019)
摘要
Using the wide-angle and small-angle X-ray diffraction techniques, the Mo density is obtained as a function of the layer thickness in periodic X-ray Mo/Si mirrors synthesized by magnetron sputtering in an argon atmosphere. By the example of a simulated aperiodic multilayer Mo/Si mirror, the necessity to take into account the real density of Mo and the incorrect use of its tabulated densities is demonstrated.
更多查看译文
关键词
X-ray multilayer mirror, X-ray diffraction, thin film density, coherent-scattering region, Williamson–Hall plot, aperiodic mirror
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络