A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage With Accelerated Iterative Parameter Tuning

Wafer stage is an important mechatronic unit of industrial lithography tool for manufacturing integrated circuits. To overcome the inherent limitations of fix-gain feedback control and improve the servo performance, a performance-oriented variable-gain control strategy with accelerated iterative parameter tuning is proposed for an ultra-precision wafer stage. The variable-gain controller comprises...