Closed-loop surface stress compensation with an electromagnetically actuated microcantilever

Daniel Kopiec,Piotr Paletko,Konrad Nieradka,Wojciech Majstrzyk,Piotr Kunicki,Andrzej Sierakowski,G Joźwiak,T Gotszalk

Sensors and Actuators B: Chemical（2015）

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摘要

•A new method for bending and stress measurements using an electromagnetically actuated cantilever was presented.•Operation of the Lorentz force actuated cantilever in a closed-loop was shown.•Presented method was successfully used for monitoring of the self-assembly process of thiophenol on gold cantilever surface with the use of home-made optical beam deflection system.

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关键词

Electromagnetically actuated cantilever,Lorentz force,Surface stress,Halbach array,Static mode

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