Realization of ultrathin silver layers in highly conductive and transparent zinc tin oxide/silver/zinc tin oxide multilayer electrodes deposited at room temperature for transparent organic devices

Thin Solid Films(2012)

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摘要
We report on transparent and highly conductive multilayer electrodes prepared at room temperature by RF sputtering of zinc tin oxide (ZTO) and thermal evaporation of ultrathin silver (Ag) as top contact for transparent organic light emitting diodes (TOLED). Specifically, we study the morphological, electrical and optical properties of the multilayer structure in particular of the thin Ag film. The tendency of Ag to form agglomerates over time on top of ZTO is shown by atomic force microscopy. From the optical constants derived from ellipsometric measurements we evidenced a bulk like behavior of an Ag film with a thickness of 8nm embedded in ZTO leading to a low sheet resistance of 9Ω/sq. Furthermore we verify the optical constants by simulation of an optimized ZTO/Ag/ZTO structure. As an application we present a highly efficient TOLED providing a device transmittance of >82% in the visible part of the spectrum. The TOLED shows no damage caused by sputtering on a lighting area of 80mm2 and exhibits efficiencies of 43cd/A and 36lm/W.
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关键词
Transparent conducting oxides,Organic electronics,Zinc-based oxides,Transparent OLED,Multilayer electrode,Inverted OLED,Molybdenum oxide,Tin based oxides
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