ChemInform Abstract: Thin Films of Ge—Sb—Te‐Based Phase Change Materials: Microstructure and in situ Transformation.

Jan Tomforde,Wolfgang Bensch,Lorenz Kienle,Viola Duppel, P Merkelbach,Matthias Wuttig

Cheminform（2011）

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摘要

Thin films of GeSb2Te4 and Ge2Sb2Te4 are deposited on inert substrates by dc magnetron sputtering from stoichiometric compound targets and characterized by powder XRD and HRTEM.

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