Efficient Nanoscale Photonic Devices And Monolithic Electronic-Photonic Subsystems In Sub-100 Nm Soi Cmos

We demonstrate efficient photonic devices that rely on sub-100nm features in unmodified 45nm SOI CMOS, including photonic crystals, array-antenna grating couplers, and modulators. We then show monolithically integrated electronic-photonic systems comprising millions of transistors and thousands of photonic devices, including a complete chip-to-chip photonic link.