Traceable Quasi-dynamic Stroboscopic Scanning White Light Interferometry

We addressed the question of how to assign confidence limits to the measured trajectory of a moving MEMS membrane. This was done by calibrating our SSWLI setup using a traceable piezoelectric transducer as a transfer standard. We calibrated our SSWLI setup for quasi-dynamic measurements of vertical movements up to 14 μm with standard uncertainty of 9.4 nm.