Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Sealing openings in micro-electromechanical systems

Jennifer Shih, Valerie J Marty, James Przybyia,Arthur Piehl,John L Williams, Christopher Leonard

mag（2005）

Cited 24|Views5
No score
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined