Nems Gas Sensors For Breakthrough Gc Multigas Analysis Systems

Eric Ollier, R Barattin,Carine Ladner,Michel Petitjean, A Bellemincomte,V Gouttenoire, K Benedetto,A Salette,N V David, V Jousseaume,Pierre Puget,Laurent Duraffourg,Eric Colinet

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)（2015）

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摘要

This paper presents NEMS gas sensors implemented in a breakthrough multigas analysis system. The NEMS mass sensors are collectively fabricated, functionalized and packaged at wafer level. NEMS array resonators exhibit good frequency stability (Allan deviation <5.10(-7) in air). After implementation in the multigas analysis system, the capability to analyze complex gas mixtures for Industrial and Indoor Air Quality monitoring has been demonstrated, with typical Limit of Detection in ppm down to ppb level.

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关键词

NEMS resonator, NEMS array, gravimetric sensor, mass sensor, gas sensor, multigas analysis system

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