Implant-defined coherent hexagonal vertical cavity surface emitting laser array

Proceedings of SPIE（2015）

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摘要

Hexagonal in-phase coherently coupled arrays of vertical cavity surface-emitting lasers (VCSELs) were fabricated using proton implantation. The arrays showed excellent beam quality with small far-field divergence angle.

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关键词

VCSEL,hexagonal,laser,in-phase

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