Ultra-high-Q air-core slab inductors for on-chip power conversion

Naigang Wang,David Goren,Eugene J Osullivan,Xin Zhang,W J Gallagher,Philipp Herget,Leland Chang

Electron Devices Meeting（2014）

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摘要

Air-core slab inductors with specially designed current return paths are proposed to achieve the ultra-high Q required for on-chip power delivery and management at >90% efficiency. Uniquely optimized for buck converter circuits, this CMOS-compatible structure avoids the challenges of thin-film magnetics. Q~25-30 at 200-300MHz is experimentally demonstrated.

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关键词

cmos integrated circuits,power convertors,power inductors,cmos-compatible structure,buck converter circuits,current return paths,frequency 200 mhz to 300 mhz,on-chip power conversion,ultrahigh-q air-core slab inductors

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