Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio

Jiwen Cui,Kunpeng Feng,Shengqi Zhu,Yue Zhang,Jiubin Tan

Measurement（2014）

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摘要

•SCP is applied to measure the dimension of micro-cavity with high aspect ratio.•Location method based on OJFMs is proposed to improve the performance of SCP.•Improved SCP is experimentally tested by measuring a blind micro-hole.

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关键词

Dimension measurement of micro-cavity with high aspect ratio,Optical fiber spherical coupling probe,Subpixel edge location

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