Tri-resistive switching behavior of hydrogen induced resistance random access memory

IEEE Electron Device Letters(2014)

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摘要
In this letter, the special role of hydrogen ions in hafnium doped silicon oxide resistive random access memory (RRAM) is presented. In addition to the more typical oxygen ion-dominated resistive switching, hydrogen ions were also observed to trigger a resistance transformation phenomenon, producing a tri-resistive device. Unlike a normal RRAM device, a hydrogen plasma-treated device is operated w...
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关键词
Switches,Hydrogen,Plasmas,Silicon,Resistance,Educational institutions,Ions
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