High Beam Quality of In-Phase Coherent Coupling 2-D VCSEL Arrays Based on Proton-Implantation

Mingming Mao,Chen Xu,Qiang Kan,Yiyang Xie,Meng Xun,Kun Xu,Jiucheng Liu,Haiqiang Ren,Hongda Chen

Photonics Technology Letters, IEEE（2014）

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摘要

Two-dimensional coherently coupled arrays of vertical cavity surface emitting lasers were fabricated using proton implantation. A 2 × 2 array with the far field beamwidth of 3.6° ( 1.18×diffraction limited), the output power of 0.45 mW, and the spectral line width of 0.2 nm was achieved for continuous wave operation at room temperature. It showed an excellent beam quality due to the in-phase coupling among the elements in the array. The array performance dependence on injection current level and thermal effects was discussed. The processing for the arrays is considerably simple and can be used as an alternative to other array implementations.

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关键词

injection current level,ion implantation,vertical cavity surface emitting laser fabrication,laser cavity resonators,far field beamwidth,surface emitting lasers,optical diffraction,laser beams,high beam quality,thermal effects,in-phase coherent coupling 2D VCSEL arrays,vcsel,power 45 mW,proton implantation,optical fabrication,light diffraction,continuous wave operation,spectral line breadth,wavelength 0.2 nm,optical couplers,temperature 293 K to 298 K,coherently coupled array,spectral line width,optical arrays,light coherence,Coherently coupled array,VCSEL,proton-implantation

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