3D design activities at Fermilab—Opportunities for physics

Raymond Yarema,Grezgorz Deptuch,Jim Hoff,Alpana Shenai,Marcel Trimpl,Tom Zimmerman,Marcel Demarteau,Ron Lipton,Dave Christian

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT（2010）

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摘要

Fermilab began exploring the technologies for vertically integrated circuits (also commonly known as 3D circuits) in 2006. These technologies include through silicon vias (TSV), circuit thinning, and bonding techniques to replace conventional bump bonds. Since then, the interest within the High Energy Physics community has grown considerably. This paper will present an overview of the activities at Fermilab over the last 3 years which have helped spark this interest. Published by Elsevier B.V.

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关键词

Vertical integration,3D integration

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