Performance Simulation and Architecture Optimization for CMOS Image Sensor Pixels Scaling Down to 1.0 $\mu\hbox{m}$

IEEE Transactions on Electron Devices(2010)

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摘要
As the pixel dimensions of complementary metal-oxide-semiconductor sensors are approaching the wavelength of visible light, significant diffraction effects occur in the pixel architecture region, resulting in decreased optical efficiency and increased spatial crosstalk. By introducing the finite-difference time-domain approach, the performance of the typical 1.75-, 1.35-, and 1.05-μm pitch pixels ...
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关键词
Pixel,Optical crosstalk,Optical diffraction,Optical sensors,Optical imaging,Metals,Microoptics
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